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HYT

Inventors of in situ monitoring

Hach Ultra continues a legacy of innovation with HYT vacuum particle count systems. As the first to offer in situ particle monitoring (ISPM) for semiconductor process equipment, HYT brand monitoring solutions continue to lead the industry.

HYT products offer real time, continuous monitoring to rapidly identify particle sources and identify intermittent events, as well as automatic process control: no operators, monitor wafers, or downtime for process checks.

 

See Also
HYT 20SX/25SX
Vacuum Particle Sensors
  • High power laser diode for 0.19 micron sensitivity and large detection area
  • 20SX: Ultra compact probe design for installation in restricted spaces
  • 25SX: Mount directly within a chamber or process module for in-chamber monitoring
HYT PM450 HYT PM-450
Vacuum Particle Controller
  • Interface between sensors and data acquisition systems
  • Support real-time particle monitoring tasks
  • Uses Sensor Bus and web server technology
HYT PM-250E/255E
Vacuum Particle Controller
  • Interface between sensors and data acquisition systems
  • Support real-time particle monitoring tasks
  • Machine Trigger capability synchronizes particle data collection with semiconductor production process cycle
HYT MVP
Mobile Vacuum Particle Monitoring System
  • Sensitivity to 0.17 microns
  • Compatible with more process conditions
  • Compatible with Particle Vision Online software
HYT 9000
Vacuum Particle Sensor
  • Use in plasma or high ambient light environments.
  • Bright field laser particle sensor for ISPM
  • Integrate into vacuum chambers, manifolds, and pump lines with no conductance loss
HYT 70XE HYT 70XE
Vacuum Particle Sensor
  • Specifically designed for in situ particle monitoring (ISPM)
  • Use with an HYT controller
  • Integrate into large pump line configurations.

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